报告人：陈世祈 教授
报告人单位：香港中文大学机械与自动化工程系
主持人：顾澄琳 副研究员
报告时间：2023年5月23日（周二）下午13:30-15:00
报告摘要：
纳米技术的主要挑战之一是制造复杂的 3D 结构。目前材料的选择仍然主要限于聚合物材料或金属。在不影响现有结构复杂性、纳米级特征尺寸和材料功能的情况下，不同材质的纳米加工仍然是一个关键的挑战。报告介绍了课题组在超快激光3D 纳米并行加工方面的工作，实现了创纪录的分辨率 (20 nm)、激光图案化速率 (300 mm3/hr) (Science 366 (6461), 2019) 和广泛材料类型。报告介绍了使用飞秒光片对不同材料进行激光微纳加工，然后通过双光子聚合制造复杂的 3D 结构。通过结合飞秒光片和可膨胀水凝胶，在多种材料基地包括金属、金属氧化物、半导体、介电材料等实现了高质量的纳米加工，使得纳米级 3D 功能设备的制造成为可能(Science 378 (6626), 2022)。我们的新方法提供了一种有效且低成本的解决方案来扩大功能性微结构和纳米结构的制造（约 1.5 美元/mm3）。该技术可能在医疗保健、清洁能源和水、计算和电信等领域发挥重要作用。
报告人简介：
Dr. Shih-Chi Chen is a Professor in the Department of Mechanical and Automation Engineering at the Chinese University of Hong Kong. He received his B.S. degree in Mechanical Engineering from the National Tsing Hua University, Taiwan, in 1999; and his S.M. and Ph.D. degrees in Mechanical Engineering from the Massachusetts Institute of Technology, Cambridge, in 2003 and 2007, respectively. Following his graduate work, he entered a post-doctoral fellowship in the Wellman Center for Photomedicine, Harvard Medical School, where his research focused on biomedical optics and endomicroscopy. From 2009 to 2011, he was a Senior Scientist at Nano Terra, Inc., a start-up company founded by Prof. George Whitesides at Harvard University, to develop precision instruments for novel nanofabrication processes. His current research interests include ultrafast laser applications, biomedical optics, precision engineering, and nanomanufacturing. Dr. Chen is a Fellow of Optica (formerly OSA), senior member of SPIE, and members of the American Society for Precision Engineering (ASPE), American Society of Mechanical Engineers (ASME), and Hong Kong Young Academy of Sciences (YASHK). He currently serves as the Associate Editor of ASME Journal of Micro- and Nano-Manufacturing, IEEE Transactions on Nanotechnology, and HKIE Transactions. In 2003 and 2018, he received the prestigious R&D 100 Awards for developing a six-axis nanopositioner and an ultrafast nanoscale 3-D printer respectively.
